Special Issue on Ultra-precision Positioning Technologies. Sensor and Positioning in Semiconductor Lithography.
نویسندگان
چکیده
منابع مشابه
Special Issue on Global Positioning System - Proceedings of the IEEE
The Global Positioning System (GPS) is a great technological success story. It was developed by the Department of Defense (DoD) primarily for the U.S. military to provide precise estimates of position, velocity, and time. Civil use was a secondary objective. On the basis of national security considerations, the civil users of GPS have been limited to a purposefully degraded subset of the signal...
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INSTRUCTIONS The technology for ultra-precision machining has been developed rapidly and steadily. In recent years, the demand for free form, complex and microscopic cutting has increased as a result of the need for highvalue-added fabrication for items such as high NA glass lenses, micro-grooves, diffractive aspheric lenses and other optical components. The ultra-precision machine for cutting ...
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MODEL REFERENCE CONTROL FOR ULTRA-HIGH PRECISION POSITIONING SYSTEMS by Lan Yu Due to the increasing demands of high-density semiconductors, molecular biology, optoelectronics, and MEMS/NEMS in the past decades, control of ultra-high precision positioning using piezoelectricity has become an important area because of its high displacement resolution, wide bandwidth, low power consumption, and p...
متن کاملPositioning Technologies in Learning
In the following we discuss how a high precision, in-door positioning system (UNIZAR positioning system) can be part of a general positioning system to fit into different application areas depending on different needs and requirements for precision. Specific focus is put on applications for learning and training contexts. We argue that many innovative user interfaces for learning are based on d...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1991
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.57.1731